6 points | by yogthos 6 hours ago ago
2 comments
... Immersion DUV prints 28nm-class features in a single exposure and reaches 7nm through multipatterning, at a cost in overlay errors and yield. ...
So, this is not EUV, this is still DUV, which still means substantially reduced yield due to overlay errors.
You have to start somewhere.
... Immersion DUV prints 28nm-class features in a single exposure and reaches 7nm through multipatterning, at a cost in overlay errors and yield. ...
So, this is not EUV, this is still DUV, which still means substantially reduced yield due to overlay errors.
You have to start somewhere.